Fabrication of 20 nm half-pitch gratings by corrugation-directed self-assembly
- Ho-Cheol Kim
- Charles T. Rettner
- et al.
- 2008
- Nanotechnology
Publications
4 results for Linnea Sundström
Self-aligned, self-assembled organosilicate line patterns of ∼20nm half-pitch from block copolymer mediated self-assembly
- Ho-Cheol Kim
- Joy Cheng
- et al.
- 2007
- SPIE Advanced Lithography 2007
Templated germanium nanowire synthesis using oriented mesoporous organosilicate thin films
- Hemanth Jagannathan
- Michael Deal
- et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Patterning ∼20 nm half-pitch lines on silicon using a self-assembled organosilicate etch mask
- Linnea Sundström
- Leslie Krupp
- et al.
- 2006
- Applied Physics Letters