Publications

8 results for M.P. Manny

Lithography and fabrication processes for sub-100 nm scale complementary metal-oxide semiconductor
- - S.J. Wind
  - Y. Taur
  - et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Octagonal Washer De Squids and Integrated Susceptometers Fabricated in a Planarized Sub-^Im Nb - A10X - Nb Technology
- - M.B. Ketchen
  - D.J. Pearson
  - et al.
- 1993
- IEEE TAS
Sub-μm linewidth input coils for low T_c integrated thin-film dc superconducting quantum interference devices
- - M.B. Ketchen
  - K. Stawiasz
  - et al.
- 1992
- Applied Physics Letters
Sub-μm, planarized, Nb-AlO_x-Nb Josephson process for 125 mm wafers developed in partnership with Si technology
- - M.B. Ketchen
  - D.J. Pearson
  - et al.
- 1991
- Applied Physics Letters
Characteristics of vertical p-channel MOSFETs for high density circuit application
- - D.S. Wen
  - W.H. Chang
  - et al.
- 1991
- VLSI-TSA 1991
SiGe-base PNP transistors fabricated with N-type UHV/CVD LTE in a 'No Dt' process
- - D.L. Harame
  - J.M.C. Stork
  - et al.
- 1990
- VLSI Technology 1990
Stepper self-metrology using automated techniques
- - T.A. Brunner
  - J.M. Lewis
  - et al.
- 1990
- Microlithography 1990
Submicron high performance bipolar technology
- - T.C. Chen
  - J.D. Cressler
  - et al.
- 1989
- VLSI Technology 1989