Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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13 results for E.J. Petrillo

Sidewall Spacer Technology for MOS and Bipolar Devices
- - Sang H. Dhong
  - Edward J. Petrillo
- 2019
- JES
A Highly Latchup-Immune 1-μm CMOS Technology Fabricated with 1-MeV Ion Implantation and Self-Aligned TiSi₂
- - Fang-Shi J. Lai
  - L.K. Wang
  - et al.
- 1986
- IEEE T-ED
Study of silicon contamination and near-surface damage caused by CF ₄/H₂ reactive ion etching
- - G.S. Oehrlein
  - R.M. Tromp
  - et al.
- 1984
- Applied Physics Letters