Metal-metal epitaxy on silicon near room temperature: rhodium and iridium
- Chin-An Chang
- 1990
- Surface Science
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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119 results for Chin-An Chang
Adhesion studies of metals on fluorocarbon polymer films
- Chin-An Chang
- Yong-Kil Kim
- et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
(100) and (111) Ni films epitaxially grown on Cu by the metal-metal epitaxy on silicon technique near room temperatures
- Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ta as a barrier for the Cu/PtSi, Cu/Si, and Al/PtSi structures
- Chin-An Chang
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Thermal stability of the Cu/Pd/Si metallurgy
- Chin-An Chang
- 1989
- Applied Physics Letters
Formation of palladium silicide in the presence of Al with and without a carbon barrier layer
- Chin-An Chang
- 1989
- Applied Physics Letters
Novel method of patterning YBaCuO superconducting thin films
- Q.Y. Ma
- E.S. Yang
- et al.
- 1989
- Applied Physics Letters
Carbon as a barrier for the outdiffusion of Cu
- Chin-An Chang
- D.S. Yee
- et al.
- 1989
- Applied Physics Letters
Outdiffusion of Cu through Au: Comparison of (100) and (111) Cu films epitaxially deposited on Si, and effects of annealing ambients
- Chin-An Chang
- 1989
- Applied Physics Letters
Thermal stability of the Cu/PtSi metallurgy
- Chin-An Chang
- 1989
- Journal of Applied Physics