E.A. Irene, N.J. Chou, et al.
JES
Paper
WP-A7 Some Physical Properties of Dry High-Pressure Oxide Films on Silicon
Abstract
No abstract available.
Related
V.J. Silvestri, E.A. Irene, et al.
Journal of Electronic Materials
A. Hartstein, J.C. Tsang, et al.
Applied Physics Letters
D.J. DiMaria, T.N. Theis, et al.
Journal of Applied Physics