PublicationVLSI-TSA 2005Conference paperUltra-thin SOI replacement gate CMOS with ALD TaN / high-k gate stackVLSI-TSA 2005View publicationAbstractNo abstract available.Home↳ PublicationsDate31 Oct 2005PublicationVLSI-TSA 2005AuthorsB. DorisB.P. LinderV. NarayananS. CallegariE. GousevD.-G. ParkK. SettlemyerP. JamisonD. BoydY. LiJ. HaganT. StaendertJ. MezzapelliD. DobuzinskyK.W. GuariniR. JammyM. IeongIBM-affiliated at time of publicationShare