J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
No abstract available.
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Frank R. Libsch, S.C. Lien
IBM J. Res. Dev
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SPIE Advanced Lithography 2007
S.M. Sadjadi, S. Chen, et al.
TAPIA 2009