Transmission Electron Microscopy

Abstract

TEM working principle • TEM sample preparation - FIB: less damage, better resolution, thinner sample thickness, and faster throughput • Principle of TEM image contrast: TEM vs. STEM • Chemical analysis: EDX & EELS • Strain measurement: NBD, GPA, Holography, PED • Spherical aberration (Cs) correction TEM - ultimate resolution and analytical capability.