Tin Oxide Overcoats for Thin Film Magnetic Recording Media

Abstract

Material and tribological properties of reactively sputtered tin oxide, SnO2, films were determined as a function of deposition conditions. Increased substrate deposition temperature improves hardness and lowers wear rate. Oxygen partial pressure around 0.01 Pa yields maximum hardness and minimum stress and wear rate. Films prepared at these partial pressures and 150°C are stoichlometric and crystalline. Thin film magnetic recording media with lubricated tin oxide overcoats have low static friction and good start/stop lifetimes. © 1990 IEEE