SiON-based integrated optics devices for WDM networks
F. Horst, R. Beyeler, et al.
LEOS 1999
We have investigated the sidewall recombination in dry-etched GaAs/GaAlAs wires with widths between 12 μm and 300 nm using picosecond spectroscopy. The wires were fabricated with electron beam lithography and different reactive ion etching processes. The excitonic lifetimes decrease strongly with decreasing wire widths due to sidewall recombination. Using a model calculation to fit the experimentally observed width dependence of the lifetimes the surface recombination velocity is determined to be S=2×106 cm/s at 50 K. S increases with temperature and is independent of the etching process.
F. Horst, R. Beyeler, et al.
LEOS 1999
P. Linger, G.L. Bona, et al.
ISLC 1992
G.L. Bona, R. Germann, et al.
ICPI 1999
F. Horst, R. Germann, et al.
IEEE Photonics Technology Letters