Takatoshi Tsujimura, Frank Libsch, et al.
Journal of the Society for Information Display
In this letter, the integration of CMOS-compatible thru-Si via (TSV) interconnects with deep-trench decoupling capacitors is demonstrated. Reliability test is performed with a 65-nm CMOS test chip on top of a 3-D Si interposer chip that contains 10000 TSV interconnects. Multilayer stacking is also demonstrated, and capacitance density of 280 nFmm2 is achieved with two-layer Si interposer chip stacks. © 2006 IEEE.
Takatoshi Tsujimura, Frank Libsch, et al.
Journal of the Society for Information Display
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ECTC 2013
Mark D. Schultz, Fanghao Yang, et al.
ASME Journal of Electronic Packaging
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ECTC 2014