Conference paper
Soft x-ray diffraction of striated muscle
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
The electrical and physical properties of ultra-thin zirconium silicate films deposited by the jet-vapor-deposition (JVD) process were reported. The fabrication of the films with equivalent oxide thickness of 1 nm with high thermal stability, low leakage and good electrical properties was shown. It was shown that zirconium silicate films can survive an annealing temperature as high as 1000°C.
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
Hiroshi Ito, Reinhold Schwalm
JES