Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have prepared a variety of high molecular weight, thermally stable, blue-light-emitting random copolymers of 9,9-di-n-hexylfluorene by nickel(0)-mediated polymerization. The copolymers are readily soluble and easily processable from organic solvents. Both the polymer and electronic properties may be tuned by selection of comonomer structure. The electronic properties also vary with composition and film morphology. A blue-light-emitting device has been prepared using ionic salts for electrochemical doping.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering