Conference paperCapillary-driven microfluidic chips with evaporation-induced flow control and dielectrophoretic microbead trappingYuksel Temiz, Jelena Skorucak, et al.SPIE Photonics West 2014
Conference paperUsing the critical ionization model for resist development to estimate contrast curves and rougheningFrances A. Houle, William D. Hinsberg, et al.Microlithography 2003
PaperAutomorphisms of compact groupsBruce Kitchens, Klaus SchmidtErgodic Theory and Dynamical Systems
Conference paperLithographic characteristics of 193-nm resists imaged at 193 and 248 nmJuliann Opitz, Robert D. Allen, et al.Microlithography 1998
