C.Y. Wong, C.R.M. Grovenor, et al.
Journal of Applied Physics
The system of computer control of STEM operation for EELS acquisition is described. The ability to obtain analytical information from 1 nm sized areas during a 15 min integration time is illustrated. The system of hardware and software is discussed in general terms to highlight the organizational philosophy which allows complex and adaptable behavior with a minimum of construction effort. © 1982.