William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
High-power sliding-spark capillary discharges in vacuum may be operated so as to obtain soft x-ray radiation that is dominated by either line emission or continuum emission. In the latter case, black-body emission is obtainable with emission efficiencies exceeding 30% of input power. Adjustments in the spectral output of the discharge are achievable either with a conically tapered capillary or with electron-beam assisted heating of the discharge. Such devices are useful for high-resolution contact microscopy of wet, unstained, thin biological samples as well as for lithography. © 1981 Springer-Verlag.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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Proceedings of SPIE 1989
R.D. Murphy, R.O. Watts
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