R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
We demonstrate an energy-efficient programmable via concept using indirectly heated phase-change material. This via structure has maximum phase-change volume to achieve a minimum on resistance for high performance logic applications. Process development and material investigations for this device structure are reported. The device concept is successfully demonstrated in a standard CMOS-compatible technology capable of multiple cycles between on/off states for reconfigurable applications. © 2010 IOP Publishing Ltd.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Imran Nasim, Melanie Weber
SCML 2024
J. Tersoff
Applied Surface Science
P.C. Pattnaik, D.M. Newns
Physical Review B