A. Gangulee, F.M. D'Heurle
Thin Solid Films
A unimolecular templating star-shaped polymer with a compatibilizing outer corona, prepared by tandem ROP/ATRP procedures, was dispersed into a thermosetting organosilicate. The organic polymer was thermalized to leave behind its latent image in the matrix with a pore size that reflected the size of the polymer molecule, and provided the expected reduction in dielectric constant.
A. Gangulee, F.M. D'Heurle
Thin Solid Films
R. Ghez, J.S. Lew
Journal of Crystal Growth
J.H. Stathis, R. Bolam, et al.
INFOS 2005
A. Reisman, M. Berkenblit, et al.
JES