Conference paper
Airborne chemical contamination of a chemically amplified resist
Scott A. MacDonald, N.J. Clecak, et al.
Microlithography 1991
Scott A. MacDonald, N.J. Clecak, et al.
Microlithography 1991
T.J. Chuang, R.J. Cox, et al.
JACS
N.J. Clecak, R.J. Cox, et al.
Polymer Engineering & Science
Hiroshi Ito, William P. England, et al.
Microlithography 1993