Surface modification with lasers

Abstract

Laser‐induced processing has been widely exploited in the microelectronics industry, to produce deposits with well‐controlled chemical composition, feature size, and morphology. A brief survey of the most commonly used techniques for laser patterning of materials on surfaces is presented. The issues which are key to continued progress in the field of surface modification with lasers are examined, including laser heating of surfaces, the role of mass transport in the kinetics of deposit growth, the study of the surface reactions involved in laserinduced processes, and some aspects of materials properties which are important in surface modification techniques. Copyright © 1990 Verlag GmbH & Co. KGaA, Weinheim