J.A. Lubguban, S. Gangopadhyay, et al.
Journal of Materials Research
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films was discussed. Both closed and open cell porous structures were prepared by varying the porogen load. Structural characterization of the samples conducted using transmission electron microscope, small angle x-ray scattering, and Fourier transform infrared spectroscopy confirmed the extraction of the porogen.
J.A. Lubguban, S. Gangopadhyay, et al.
Journal of Materials Research
J.A. Lubguban, S. Gangopadhyay, et al.
Journal of Materials Research
B. Lahlouh, T. Rajagopalan, et al.
MRS Proceedings 2003
S. Gangopadhyay, J.A. Lubguban, et al.
MRS Proceedings 2004