M.T. Othman, J.A. Lubguban, et al.
Journal of Applied Physics
Paper
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
Abstract
Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films was discussed. Both closed and open cell porous structures were prepared by varying the porogen load. Structural characterization of the samples conducted using transmission electron microscope, small angle x-ray scattering, and Fourier transform infrared spectroscopy confirmed the extraction of the porogen.
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