Summary Abstract: Microstructure and electrical conductivity of plasma deposited gold/fluorocarbon composite films

P. Martensson, R.M. Feenstra

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Daniel J. Coady, Amanda C. Engler, et al.

ACS Macro Letters

Joy Y. Cheng, Daniel P. Sanders, et al.

SPIE Advanced Lithography 2008

Lawrence Suchow, Norman R. Stemple

JES