PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperSummary Abstract: Desorption dynamics of SiF4etch productJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1988PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsF.A. HouleIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
