Strain relaxation mechanisms of thin deposited films

Paper

24 Oct 2006

Abstract

No abstract available.

Conference paper

L.K. Wang, A. Acovic, et al.

MRS Spring Meeting 1993

Paper

Julian J. Hsieh

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Paper

P. Martensson, R.M. Feenstra

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Conference paper

M. Hargrove, S.W. Crowder, et al.

IEDM 1998