SOI Slotted Photonic Crystal Cavities Spanning from 1.3 to 1.6 μm with Q/V Factors above 800 000

A series of slot Si-on-SiO2 photonic crystal heterostructure cavities with resonant wavelengths ranging from 1.28 to 1.6 μm is reported. These cavities, presenting Q/V factors typically around 800 000, can be used for the hybrid integration of various active materials within the silicon photonics platform.