Eberhard Spiller, Daniel Stearns, et al.
Journal of Applied Physics
Paper
Smoothing of multilayer x-ray mirrors by ion polishing
Abstract
Ion bombardment at grazing angles of incidence is used to smoothen the boundaries within multilayer x-ray mirrors. Increases in the reflectivity by a factor of 2 for soft x rays have been obtained for RhRu-C mirrors with periods of 60 Å.
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