Conference paperDetermination of thickness errors and boundary roughness from the measured performance of a multilayer coatingEberhard Spiller, Alan E. RosenbluthProceedings of SPIE 1989
PaperCopolymers of Methyl Methacrylate and Methacrylic Acid and Their Metal Salts as Radiation Sensitive ResistsIvan Haller, Ralph Feder, et al.JES
Conference paperFabrication of free-standing x-ray transmission gratings and zone platesY. Vladimirsky, E. Kallne, et al.Proceedings of SPIE 1989