Eberhard Spiller
Applied Optics
Multilayer mirrors have been fabricated for various angles of incidence throughout the wavelength range λ=1.5-160 Å. Reflectivity increases by more than a factor 103 over the best single-film reflectors have been obtained. Measured reflectivities are around 10% near normal incidence in the λ=45-160-Å wavelength region and above 50% near grazing incidence (grazing angle 1°-2°) for λ=1.54 Å. The required thickness control has been achieved by monitoring the reflectivity of the films in situ during the deposition.
Eberhard Spiller
Applied Optics
Eberhard Spiller, Kurt Grebe, et al.
Proceedings of SPIE 1989
Eberhard Spiller, Armin Segmüller
Applied Physics Letters
Cindy J. Hayden, Eberhard Spiller
Applied Optics