Fabrication and testing of large area multilayer coated x-ray optics

Abstract

We discuss the procedures developed for the production and testing of multilayer x-ray mirrors on large figured optical surfaces. Methods which are generally useful for characterizing the performance of such optics are presented, as well as specific results from the production of a 25-cm diam Ritchey-Chretien telescope for a wavelength of λ = 63.5 Å. The latter is a two-mirror system, which places additional stringent requirements upon the accuracy and quality of the coatings. © 1989 Optical Society of America.