Paper
Ion beam oxidation
J.M.E. Harper, M. Heiblum, et al.
Journal of Applied Physics
It is demonstrated that by covering a tungsten surface with tungsten needles, the sputtering coefficient for He ions is reduced by a factor of 3 to 100. Also, this metal surface does not blister under He bombardment to doses of 2.8×1019 He/cm2, although a similar polished W surface blisters at 1/30 this dose. Sputtering yields have been determined for both monoenergetic and distributed energy He ion beams, and the angular distribution of sputtered ions is reported.
J.M.E. Harper, M. Heiblum, et al.
Journal of Applied Physics
J.M.E. Harper, J.J. Cuomo, et al.
Journal of Applied Physics
J.F. Ziegler
Nuclear Inst. and Methods in Physics Research, B
Joseph M. Blum, J.C. Mcgroddy, et al.
IEEE JQE