Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Let S be a set of n closed intervals on the x-axis. A ranking assigns to each interval, s, a distinct rank, p(s)∈ {1, 2,…, n}. We say that s can see t if p(s)<p(t) and there is a point p∉ s∩ t so that p∉u for all u with p(s)<p(u)<p(t). It is shown that a ranking can be found in time O(n log n) such that each interval sees at most three other intervals. It is also shown that a ranking that minimizes the average number of endpoints visible from an interval can be computed in time 0(n5/2). The results have applications to intersection problems for intervals, as well as to channel routing problems which arise in layouts of VLSI circuits. © 1990, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Minghong Fang, Zifan Zhang, et al.
CCS 2024
John S. Lew
Mathematical Biosciences
Michael E. Henderson
International Journal of Bifurcation and Chaos in Applied Sciences and Engineering