I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
R. Ghez, M.B. Small
JES
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007