Process integration of self-assembled polymer templates into silicon nanofabrication

K.W. Guarini; C.T. Black; Y. Zhang; H. Kim; E. Sikorski; I. Babich

doi:10.1116/1.1521730

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Paper

09 Dec 2002

Process integration of self-assembled polymer templates into silicon nanofabrication

View publication

Abstract

A set of key processes for nanometer-scale pattern transfer using a self-assembled polymer mask was developed and integrated. As a result, a variety of silicon nanostructures were built.

Paper

Catalyst chelation effects in organocatalyzed ring-opening polymerization of lactide

Daniel J. Coady, Amanda C. Engler, et al.

ACS Macro Letters

Paper

AF-Net: An Active Fire Detection Model Using Improved Object-Contextual Representations on Unbalanced UAV Datasets

Xikun Hu, Wenlin Liu, et al.

IEEE J-STARS

Paper

Holes trapped near Mg²⁺ and Al³⁺ impurities in SrTiO₃

O.F. Schirmer, W. Berlinger, et al.

Solid State Communications

Paper

Structural and magnetic properties of Cr and Mn doped InN

A. Ney, R. Rajaram, et al.

Journal of Magnetism and Magnetic Materials

View all publications

Abstract

Related

Catalyst chelation effects in organocatalyzed ring-opening polymerization of lactide

AF-Net: An Active Fire Detection Model Using Improved Object-Contextual Representations on Unbalanced UAV Datasets

Holes trapped near Mg2+ and Al3+ impurities in SrTiO3

Structural and magnetic properties of Cr and Mn doped InN

Holes trapped near Mg²⁺ and Al³⁺ impurities in SrTiO₃