Process integration of self-assembled polymer templates into silicon nanofabrication

K.W. Guarini; C.T. Black; Y. Zhang; H. Kim; E. Sikorski; I. Babich

doi:10.1116/1.1521730

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Paper

09 Dec 2002

Process integration of self-assembled polymer templates into silicon nanofabrication

View publication

Abstract

A set of key processes for nanometer-scale pattern transfer using a self-assembled polymer mask was developed and integrated. As a result, a variety of silicon nanostructures were built.

Paper

Diffused Junctions in GaAs Injection Lasers

J.C. Marinace

JES

Paper

Scanning tunneling microscopy of individual molecules: Beyond imaging

J.K. Gimzewski, T.A. Jung, et al.

Surface Science

Paper

Kinetic model for the chemical vapor deposition of tungsten in the silane reduction process

Julian J. Hsieh

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Paper

ESR and optical absorption of bound-small polarons in YAlO3

O.F. Schirmer, K.W. Blazey, et al.

Physical Review B

View all publications

Abstract

Related

Diffused Junctions in GaAs Injection Lasers

Scanning tunneling microscopy of individual molecules: Beyond imaging

Kinetic model for the chemical vapor deposition of tungsten in the silane reduction process

ESR and optical absorption of bound-small polarons in YAlO3