Rohit S. Shenoy, Geoffrey W. Burr, et al.
Semiconductor Science and Technology
A numerical simulation is used to investigate and optimize the diffraction performance of 2-D restricted volume gratings with variable coupling strength. Results on angle and wavelength selectivity are given, and the potential use in grating design discussed. © 2003 Optical Society of America.
Rohit S. Shenoy, Geoffrey W. Burr, et al.
Semiconductor Science and Technology
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
T. Grosjean, M. Mivelle, et al.
Optics Express
Sanjay Kariyappa, Hsinyu Tsai, et al.
IEEE T-ED