Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
The viscosity of some borosilicate glasses increases with heat‐treatment time for phase separation. The viscosity increase in the initial stage of phase separation is attributed to the composition change of the separated phases. The origin of the viscosity increase in the later stage of phase separation is the subject of controversy. Namely, the viscosity increase has been attributed to two different mechanisms: (1) environmental relaxation and (2) the increase of silica content in the high‐viscosity silica‐rich continuous phase. Analyses are presented to show that the latter model is consistent with the experimental data. Copyright © 1992, Wiley Blackwell. All rights reserved
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Michiel Sprik
Journal of Physics Condensed Matter
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010