Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
L Auslander, E Feig, et al.
Advances in Applied Mathematics