Sankar Basu
Journal of the Franklin Institute
Sankar Basu
Journal of the Franklin Institute
D.S. Turaga, K. Ratakonda, et al.
SCC 2006
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007