H. Sontag, A.C. Tam, et al.
The Journal of Chemical Physics
The propagation of photoacoustic pulses in thin silicon wafers is studied by a probe-beam deflection method. A comparison with transducer measurements is made, which suggests the existence of a nonpropagating plate mode. A signal-to-noise analysis is carried out, and the sensitivity of this detection scheme is analyzed for the case of high-frequency broad-band detection.
H. Sontag, A.C. Tam, et al.
The Journal of Chemical Physics
A.C. Tam, H. Sontag, et al.
IUS 1984
A.C. Tam, W. Zapka
CLEO 1982
A.C. Tam, W. Zapka, et al.
SPIE Microelectronic Processing Integration 1991