Novel scanning probe concepts for nanoscale electrical characterization

Abstract

There is a significant need for nanoscale electrical characterization of materials. However, unreliable tip apexes have severely hampered the usage of scanning probe techniques for nanoscale electrical characterization. Encapsulated conductive probes with conductive cores comprising of Platinum Silicide and an insulating encapsulation are powerful tools for electrical characterization of materials at the nanoscale. These probes are significantly wear resistant owing to their large tip-sample contact area. They can also sustain high currents. Phase transformation experiments on thin-film stacks comprising of Ge2Sb2Te5 phase change material are presented to demonstrate the applicability of these probes. The large tip-sample contact area and the subsequently increased adhesive force also motivate the usage of these probes in the retraction mode where the tip-sample contact is maintained only by virtue of the adhesive forces. This further enhances the durability of these probes making them valuable tools for nanoscale electrical characterization. © 2009 IEEE NANO Organizers.