M. Hargrove, S.W. Crowder, et al.
IEDM 1998
The sputter gun system has a unique feature which is that the substrate holder is electrically isolated from and physically outside the cathode and anode gun assembly. As a result the substrate surface temperature can be maintained at a lower level than that for the conventional diode sputtering system. This feature is particularly useful for metallization by the lift-off process. NiFe films with excellent physical and magnetic properties have been obtained. The application to overlay patterns for single-level masking bubble devices is presented. © 1976.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009