Near-infrared photon emission spectroscopy of a 45 nm SOI ring oscillator

Abstract

This paper presents, for the first time, near-infrared spectral photon emission measurements of a ring oscillator in IBM's 45 nm SOI process technology. The setup employs a cryogenically cooled MCT camera and different band-pass filters with a very broad spectral range from 850-2100 nm. The paper presents the spectral data, discusses the thermal contributions, and analyzes its impact for selecting appropriate detectors and tools for time-resolved measurements in present and future technology nodes. © 2012 IEEE.