Conference paper
15 Kb 1.5 ns Access on-chip tag SRAM
P.F. Lu, S.P. Kowalcyzk, et al.
VLSI-TSA 1997
Multilevel monolithic inductors implemented in a standard BiCMOS technology are presented. Use of top metal layers shunted with vias provides Q values approaching 10 at 2.4GHz and above 6 at 900MHz for a 2nH inductor. There is no modification to the conventional wiring metallurgy and no need for extra processing steps. © 1995, IEE. All rights reserved.
P.F. Lu, S.P. Kowalcyzk, et al.
VLSI-TSA 1997
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IEDM 1997
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