Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this paper, we describe a new approach to simulation of HgCdTe devices based on an approximation for the k·p model. We use an approximate expression for the carrier density which includes effects of carrier degeneracy and conduction band nonparabolicity. These effects are essential for accurate modeling of HgCdTe devices. The simplicity of this approximation allows us to use well-established methods of semiconductor device modeling. On the other hand, the new approach demonstrates similar accuracy to more complex models based on numerical evaluation of the nonparabolic Fermi-Dirac integral. The new model is applied to energy band calculation of HgCdTe heterojunctions and dark current calculation of HgCdTe photodiodes.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Gregory Czap, Kyungju Noh, et al.
APS Global Physics Summit 2025