R.B. Laibowitz, C.C. Tsuei, et al.
IEEE Transactions on Magnetics
Micron-wide lines of high Tc Y-Ba-Cu-O have been successfully patterned by ablating the films with a pulsed excimer laser. The high T c films are mounted onto a computer-controlled stepping stage and irradiated with a demagnified image of a variable-size rectangular aperture. This technique has been used for fabricating features ranging from several centimeters in length to submicron in width without any degradation in T c. For example, a superconducting microstructure of Y-Ba-Cu-O, nominally 1 μm wide and 2.5 μm long, with a Tc (R=0) of 88 K and a Jc of 5×104 A/cm2 at 4.2 K was fabricated.
R.B. Laibowitz, C.C. Tsuei, et al.
IEEE Transactions on Magnetics
J.R. Kirtley, C.C. Tsuei, et al.
Czechoslovak Journal of Physics
B. Schröder, W.D. Grobman, et al.
Solid State Communications
R. Mueller, K. Agyeman, et al.
Physical Review B