Magnetic lithography using flexible magnetic masks: Applications to servowriting

Abstract

In this paper, magnetic lithography using flexible magnetic masks and its application to servowriting were investigated. The mask consists of a flexible 127 μm thick polyethylene teraphtalate (PET) plastic film patterned with 160-250 nm thick soft magnetic material (FeNiCo, FeCo) and the SEM and MFM images were also obtained in this experiment.