Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present a shape control scheme for free-form solids represented in CSG as Boolean combinations of low-degree algebraic halfspaces. In this scheme, we can create manifold solids of arbitrary topology through polyhedral smoothing, and the resulting shapes may be modified by changing control points and/or control weights, with each control point and weight having a local effect. As a solid changes shape, incremental B-rep-CSG conversions are used for fast updates of the corresponding CSG representation. A key ingredient of our scheme, and a main contribution of this paper, is an algorithm that uses Kuhn-Tucker conditions to efficiently compute valid control points. Published by Elsevier Science Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thomas M. Cover
IEEE Trans. Inf. Theory
Rolf Clauberg
IBM J. Res. Dev
Kaoutar El Maghraoui, Gokul Kandiraju, et al.
WOSP/SIPEW 2010