Conference paper
Liquid immersion lithography - Evaluation of resist issues
William Hinsberg, Gregory Wallraff, et al.
Microlithography 2004
An in situ nuclear magnetic resonance (NMR) monitoring, and the application of mercury method to the copolymerization of maleic anhydride and norbornene derivatives is presented. NMR spectral data were processed for quantitative analysis by integration. Integration of the whole resonance range and the dioxane peak remained constant throughout the kinetics run, confirming the quantitative nature of the measurements.
William Hinsberg, Gregory Wallraff, et al.
Microlithography 2004
Vivek M. Prabhu, Bryan D. Vogt, et al.
Microlithography 2005
Hiroshi Ito, H.D. Truong, et al.
Polymers for Advanced Technologies
Hiroshi Ito, Dolores Miller, et al.
J Polym Sci Part A