Conference paperElectron beam testing and its application to packaging modules for very large scale integrated (vlsi) chip arraysF.J. Hohn, T.H.P. Chang, et al.Proceedings of SPIE 1989
Conference paperElectron beam fabrication and characterization of fresnel zone plates for soft x-ray microscopyD. Kern, P. Coane, et al.Proceedings of SPIE 1989
PaperArrayed miniature electron beam columnsT.H.P. Chang, L.P. Muray, et al.Microelectronic Engineering
PaperInvited: The potential of Electron Beam Technology for MicrofabricationT.H.P. ChangJapanese Journal of Applied Physics
