Influence of the 7×7-1×1 phase transition on the sticking of oxygen on Si(111)

Abstract

The effect of the 7×7 to 1×1 phase transition on the sticking coefficient S0 of oxygen on Si(111) surfaces was studied at different energies and angles of incidence of the O2 molecules. For O2 molecules with kinetic energy less than 0.08 eV, adsorption is precursor mediated and S0 on the 1×1 surface is two times higher than on the 7×7 surface. For O2 molecules with normal energy above 0.08 eV, adsorption is a direct process with an activation barrier. However, in this region, S0 and the barrier to dissociative adsorption are not sensitive to the surface reconstruction. © 1989.