PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsPaperSummary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometryJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jul 1987PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and FilmsAuthorsMing L. YuIBM-affiliated at time of publicationTopicsPhysical SciencesMaterials DiscoveryShare
