Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We investigate the infinitary logic L∞ωω, in which sentences may have arbitrary disjunctions and conjunctions, but they involve only finite numbers of distinct variables. We show that various fixpoint logics can be viewed as fragments of L∞ωω, and we describe a game-theoretic characterization of the expressive power of the logic. Finally, we study asymptotic probabilities of properties expressible in L∞ωω on finite structures. We show that the 0-1 law holds for L∞ωω, i.e., the asymptotic probability of every sentence in this logic exists and is equal to either 0 or 1. This result subsumes earlier work on asymptotic probabilities for various fixpoint logics and reveals the boundary of 0-1 laws for infinitary logics. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M.J. Slattery, Joan L. Mitchell
IBM J. Res. Dev
David A. Selby
IBM J. Res. Dev
Rajiv Ramaswami, Kumar N. Sivarajan
IEEE/ACM Transactions on Networking